Silicon Carbide Cantilevers Paddle
Alaabta oo faahfaahsan
Qalabka wax lagu rakibo ee waaberiga ah SiSiC / SiC cantilever paddle / beam wuxuu ku habboon yahay robot si otomaatig ah u rarayo isla markaana u maareynayo maxaa yeelay waxay leedahay waxqabad xasilloon, isbedel la'aan heerkulka sare iyo xoog saarista wafer. Maaddaama qaybta galka cantilever uu xasilloon yahay oo aan lahayn cillad, waxaa suurtagal ah in cabir ballaaran laga dhigo iyadoo la adeegsanayo tuubooyinka foornada ee jira. Qalabka wax lagu rakibo ee waasidka weyn ee SiSiC / SiC cantilever paddle / beam ayaa lagu dabaqi karaa LPVCD iyadoo lagu saleynayo isku dheelitirnaanta kuleylka ee isku midka ah oo leh lebbiska LPVCD, kaasoo si weyn u dheereeya dayactirka iyo wareegga nadiifinta, isla markaana si weyn u yareeya sunta.
Xuduudaha farsamada ee falcelinta isku xiran ee carbide silicone RBSIC:
| sheyga | cutub | xogta |
| Heerkulka arjiga | ℃ | 1380 |
| cufnaanta | G / cm3 | > = 3.02 |
| Furfurnaan furan | % | <0.1 |
| Miisaanka Miisaanka Adag ee Moh | 13 | |
| Xoog foorarsiga | Mpa | 250 (20 ℃) |
| Mpa | 280 (1200 ℃) | |
| Nooca dabacsanaanta | Gpa | 330 (20 ℃) |
| Gpa | 300 (1200 ℃) | |
| Kuleylka kuleylka | W / mk | 45 (1200 ℃) |
| Isku dheelitirka balaarinta kuleylka | K-1 * 10-6 | 4.5 |
| Asiidh-caddeyn la'aan | Heer sare |
Astaamaha:
a. Waxba iskama beddeleyso marka heer-kulkeedu sarreeyo oo culeyska cabbirka waferku wuu weyn yahay;
b. Caabbinta kuleylka ee heerkulka wanaagsan iyo nolosha muddada dheer;
c. Isuduwaha balaarinta kuleylka ee galka cantilever waa mid aad u yar, kaasoo si weyn u dheereeya dayactirka iyo wareegga nadiifinta;
oo si weyn u yareeya sunta
Alaabta kale ee foornada lagu sameeyo ee loo yaqaan 'silicon carbide dhoobada'
Ka sokow Reaction shibban silsilad carbide SiSiC cantilever taddalka for wafer loading, waxaan sidoo kale soo saarnaa alaabta kale ee foornada oo ay ku jiraan RBSIC / SISIC silicon carbide alwaaxdii, tuubooyin biiyaha, tuubada biiyaha muquuninta, tubada biiyaha wareegga, oxide ku xidhan SIC silicon carbide batter / setter plate iyo RBSIC qaboojiye tuubooyinka .
Xidho alaabada carbide-ka ah ee loo yaqaan 'RBSIC / SISIC silicon carbide'
Sababtoo ah badeecadayada 'RBSIC / SISIC silicon carbide' waxay leeyihiin faa'iidooyinka iska caabbinta xirashada aadka u wanaagsan, iska caabbinta daxalka iyo muddada dheer ee adeegga, waxaa sidoo kale laga dhigi karaa xirasho dahaarro adkaysi u leh oo si fudud loogu rakibi karo dhuumaha wax lagu farsameeyo ama duufaannada.
